Beat E. Neuenschwander: search on Z-Library

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1

Robust exchangeability designs for early phase clinical trials with multiple strata

Neuenschwander, Beat, Wandel, Simon, Roychoudhury, Satrajit, Bailey, Stuart

Journal:

Pharmaceutical Statistics

Year:

2016

Language:

english

File:

PDF, 328 KB

english, 2016

2

Use of historical control data for assessing treatment effects in clinical trials

Viele, Kert, Berry, Scott, Neuenschwander, Beat, Amzal, Billy, Chen, Fang, Enas, Nathan, Hobbs, Brian, Ibrahim, Joseph G., Kinnersley, Nelson, Lindborg, Stacy, Micallef, Sandrine, Roychoudhury, Satraj

Journal:

Pharmaceutical Statistics

Year:

2014

Language:

english

File:

PDF, 1.52 MB

english, 2014

3

SPIE Proceedings [SPIE SPIE LASE - San Francisco, California, United States (Saturday 7 February 2015)] Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XX - Ship-in-a-bottle integration by hybrid femtosecond laser technology for fabrication of true 3D biochips

Roth, Stephan, Nakata, Yoshiki, Neuenschwander, Beat, Xu, Xianfan, Sima, Felix, Wu, Dong, Xu, Jian, Midorikawa, Katsumi, Sugioka, Koji

Year:

2015

Language:

english

File:

PDF, 651 KB

english, 2015

4

A Bayesian Case Study in Oncology Phase I Combination Dose-Finding Using Logistic Regression with Covariates

Bailey, Stuart, Neuenschwander, Beat, Laird, Glen, Branson, Michael

Journal:

Journal of Biopharmaceutical Statistics

Year:

2009

Language:

english

File:

PDF, 455 KB

english, 2009

5

SPIE Proceedings [SPIE SPIE LASE - San Francisco, California, United States (Saturday 1 February 2014)] Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XIX - Femtosecond laser 3D nanofabrication in glass: enabling direct write of integrated micro/nanofluidic chips

Nakata, Yoshiki, Xu, Xianfan, Roth, Stephan, Neuenschwander, Beat, Cheng, Ya, Liao, Yang, Sugioka, Koji

Year:

2014

Language:

english

File:

PDF, 951 KB

english, 2014

6

SPIE Proceedings [SPIE SPIE LASE - San Francisco, California, United States (Saturday 7 February 2015)] Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XX - Burst mode with ps- and fs-pulses: Influence on the removal rate, surface quality, and heat accumulation

Roth, Stephan, Nakata, Yoshiki, Neuenschwander, Beat, Xu, Xianfan, Neuenschwander, B., Kramer, Th., Lauer, B., Jaeggi, B.

Year:

2015

Language:

english

File:

PDF, 1.96 MB

english, 2015

7

Robust meta-analytic-predictive priors in clinical trials with historical control information

Schmidli, Heinz, Gsteiger, Sandro, Roychoudhury, Satrajit, O'Hagan, Anthony, Spiegelhalter, David, Neuenschwander, Beat

Journal:

Year:

2014

Language:

english

File:

PDF, 403 KB

english, 2014

8

Laser surface structuring with 100 W of average power and sub-ps pulses

Neuenschwander, Beat, Jaeggi, Beat, Zimmermannn, Markus, Markovic, Vesna, Resan, Bojan, Weingarten, Kurt, de Loor, Ronny, Penning, Lars

Journal:

Journal of Laser Applications

Year:

2016

Language:

english

File:

PDF, 5.20 MB

english, 2016

9

SPIE Proceedings [SPIE SPIE LASE - San Francisco, California, USA (Saturday 21 January 2012)] Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVII - Optimization of the volume ablation rate for metals at different laser pulse-durations from ps to fs

Neuenschwander, Beat, Jaeggi, Beat, Schmid, Marc, Rouffiange, Vincent, Martin, Paul-E., Hennig, Guido, Xu, Xianfan, Gu, Bo, Nakata, Yoshiki

Year:

2012

Language:

english

File:

PDF, 39.09 MB

english, 2012

10

SPIE Proceedings [SPIE SPIE LASE - San Francisco, California, United States (Saturday 13 February 2016)] Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXI - Benefits of CO 2 laser heating for high reliability fiber splicing

Neuenschwander, Beat, Roth, Stephan, Grigoropoulos, Costas P., Makimura, Tetsuya, Duke, Douglas M., Nasir, Usman, Saravanos, Elli

Year:

2016

Language:

english

File:

PDF, 766 KB

english, 2016

11

Residual heat during laser ablation of metals with bursts of ultra-short pulses

Jäggi, Beat, Förster, Daniel J., Weber, Rudolf, Neuenschwander, Beat

Journal:

Advanced Optical Technologies

Year:

2018

Language:

english

File:

PDF, 518 KB

english, 2018

12

Critical aspects of the Bayesian approach to phase I cancer trials

Beat Neuenschwander, Michael Branson, Thomas Gsponer

Journal:

Statistics in Medicine

Year:

2008

Language:

english

File:

PDF, 164 KB

english, 2008

13

Bayesian leveraging of historical control data for a clinical trial with timeâtoâevent endpoint

Roychoudhury, Satrajit, Neuenschwander, Beat

Journal:

Statistics in Medicine

Year:

2020

File:

PDF, 871 KB

2020

14

SPIE Proceedings [SPIE SPIE LASE - San Francisco, California, United States (Saturday 7 February 2015)] Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XX - Controlling depth and distance of the hole formations at the bottom of laser-scribed trenches in silicon using fs-pulses

Roth, Stephan, Nakata, Yoshiki, Neuenschwander, Beat, Xu, Xianfan, Domke, Matthias, Egle, Bernadette, Piredda, Giovanni, Fasching, Gernot, Bodea, Marius, Schwarz, Elisabeth

Year:

2015

Language:

english

File:

PDF, 687 KB

english, 2015

15

SPIE Proceedings [SPIE SPIE LASE - San Francisco, California, United States (Saturday 13 February 2016)] Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXI - Tailored femtosecond Bessel beams for high-throughput, taper-free through-silicon vias (TSVs) fabrication

Neuenschwander, Beat, Roth, Stephan, Grigoropoulos, Costas P., Makimura, Tetsuya, He, Fei, Yu, Junjie, Chu, Wei, Wang, Zhaohui, Tan, Yuanxin, Cheng, Ya, Sugioka, Koji

Year:

2016

Language:

english

File:

PDF, 1.27 MB

english, 2016

16

[Laser Institute of America ICALEOÂ® 2016: 35th International Congress on Applications of Lasers & Electro-Optics - San Diego, California, USA (October 16â20, 2016)] International Congress on Applications of Lasers & Electro-Optics - Optimized strategies for seamless stitching with synchronized galvo scanner and linear axis

Jaeggi, Beat, Neuenschwander, Beat

Year:

2016

File:

PDF, 532 KB

2016

17

SPIE Proceedings [SPIE SPIE LASE - San Francisco, California, United States (Saturday 28 January 2017)] Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXII - Ultrafast laser scribing of transparent conductive oxides in Cu(In,Ga)Se 2 solar cells via laser lift-off process: the control of laser-induced damage

Neuenschwander, Beat, Grigoropoulos, Costas P., Makimura, Tetsuya, Račiukaitis, Gediminas, Narazaki, Aiko, Sato, Tadatake, Niino, Hiroyuki, Takada, Hideyuki, Torizuka, Kenji, Nishinaga, Jiro, Kamikawa

Year:

2017

Language:

english

File:

PDF, 690 KB

english, 2017

18

SPIE Proceedings [SPIE SPIE LASE - San Francisco, California, United States (Saturday 7 February 2015)] Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XX - Improvements in ultra-high precision surface structuring using synchronized galvo or polygon scanner with a laser system in MOPA arrangement

Roth, Stephan, Nakata, Yoshiki, Neuenschwander, Beat, Xu, Xianfan, Zimmermann, M., Jaeggi, B., Neuenschwander, B.

Year:

2015

Language:

english

File:

PDF, 762 KB

english, 2015

19

SPIE Proceedings [SPIE LASE - San Francisco, California (Saturday 23 January 2010)] Laser Applications in Microelectronic and Optoelectronic Manufacturing XV - Processing of metals and dielectric materials with ps-laserpulses: results, strategies, limitations and needs

Neuenschwander, Beat, Bucher, Guido F., Nussbaum, Christian, Joss, Benjamin, Muralt, Martin, Hunziker, Urs W., Schuetz, Peter, Niino, Hiroyuki, Meunier, Michel, Gu, Bo, Hennig, Guido

Year:

2010

Language:

english

File:

PDF, 8.78 MB

english, 2010

20

SPIE Proceedings [SPIE SPIE LASE - San Francisco, California, United States (Saturday 1 February 2014)] Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XIX - Focal length stabilization of a tunable lens integrated focus shifting unit

Nakata, Yoshiki, Xu, Xianfan, Roth, Stephan, Neuenschwander, Beat, Eberle, Gregory, Boesser, Benjamin, Wegener, Konrad

Year:

2014

Language:

english

File:

PDF, 1.38 MB

english, 2014

21

SPIE Proceedings [SPIE SPIE LASE - San Francisco, California, United States (Saturday 7 February 2015)] Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XX - Evaluation of electrical shunt resistance in laser scribed thin-films for CIGS solar cells on flexible substrates

Roth, Stephan, Nakata, Yoshiki, Neuenschwander, Beat, Xu, Xianfan, Markauskas, E., Gečys, P., Račiukaitis, G.

Year:

2015

Language:

english

File:

PDF, 1.88 MB

english, 2015

22

SPIE Proceedings [SPIE SPIE LASE - San Francisco, California, United States (Saturday 13 February 2016)] Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXI - Laser applications in advanced chip packaging

Neuenschwander, Beat, Roth, Stephan, Grigoropoulos, Costas P., Makimura, Tetsuya, Müller, Dirk, Held, Andrew, Pätzel, Rainer, Clark, Dave, van Nunen, Joris

Year:

2016

Language:

english

File:

PDF, 533 KB

english, 2016

23

Meta-analysis of few small studies in orphan diseases

Friede, Tim, Röver, Christian, Wandel, Simon, Neuenschwander, Beat

Journal:

Research Synthesis Methods

Year:

2017

Language:

english

File:

PDF, 1.24 MB

english, 2017

24

SPIE Proceedings [SPIE SPIE LASE - San Francisco, California, United States (Saturday 1 February 2014)] Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XIX - High-throughput and high-precision laser micromachining with ps-pulses in synchronized mode with a fast polygon line scanner

Nakata, Yoshiki, Xu, Xianfan, Roth, Stephan, Neuenschwander, Beat, Jaeggi, B., Neuenschwander, B., Zimmermann, M., Penning, L., deLoor, R., Weingarten, K., Oehler, A.

Year:

2014

Language:

english

File:

PDF, 3.29 MB

english, 2014

25

SPIE Proceedings [SPIE SPIE LASE - San Francisco, California, United States (Saturday 13 February 2016)] Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXI - Time-optimized laser micro machining by using a new high dynamic and high precision galvo scanner

Neuenschwander, Beat, Roth, Stephan, Grigoropoulos, Costas P., Makimura, Tetsuya, Jaeggi, Beat, Neuenschwander, Beat, Zimmermann, Markus, Zecherle, Markus, Boeckler, Ernst W.

Year:

2016

Language:

english

File:

PDF, 6.23 MB

english, 2016

26

SPIE Proceedings [SPIE SPIE LASE - San Francisco, California, United States (Saturday 1 February 2014)] Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XIX - Surface structuring of zirconium-based bulk metallic glasses using ultrashort laser pulses

Nakata, Yoshiki, Xu, Xianfan, Roth, Stephan, Neuenschwander, Beat, Dold, Claus, Kachel, Martin, Wortmann, Dirk, Wessels, Victor, Dohrn, Andreas, Bruinink, Arie, Pude, Frank, Loeffler, Joerg F., Popraw

Year:

2014

Language:

english

File:

PDF, 3.62 MB

english, 2014

27

The current state of Bayesian methods in medical product development: survey results and recommendations from the DIA Bayesian Scientific Working Group

Natanegara, Fanni, Neuenschwander, Beat, Seaman, John W., Kinnersley, Nelson, Heilmann, Cory R., Ohlssen, David, Rochester, George

Journal:

Pharmaceutical Statistics

Year:

2014

Language:

english

File:

PDF, 138 KB

english, 2014

28

SPIE Proceedings [SPIE SPIE LASE - San Francisco, California, United States (Saturday 7 February 2015)] Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XX - Experimental investigation of CFRP cutting with nano second laser under air and Ar gas ambience

Roth, Stephan, Nakata, Yoshiki, Neuenschwander, Beat, Xu, Xianfan, Sato, Yuji, Tsukamoto, Masahiro, Matsuoka, Fumihiro, Yamashita, Kensuke, Takahashi, Kenjiro, Masuno, Shinichiro

Year:

2015

Language:

english

File:

PDF, 7.19 MB

english, 2015

29

SPIE Proceedings [SPIE SPIE LASE - San Francisco, California, United States (Saturday 1 February 2014)] Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XIX - High-resolution imaging of ejection dynamics in laser-induced forward transfer

Nakata, Yoshiki, Xu, Xianfan, Roth, Stephan, Neuenschwander, Beat, Pohl, R., Visser, C. W., Römer, G. R. B. E., Sun, C., Huis in 't Veld, A. J., Lohse, D.

Year:

2014

Language:

english

File:

PDF, 2.10 MB

english, 2014

30

SPIE Proceedings [SPIE SPIE LASE - San Francisco, California, United States (Saturday 1 February 2014)] Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XIX - Flexible metal patterning in glass microfluidic structures using femtosecond laser direct-write ablation followed by electroless plating

Nakata, Yoshiki, Xu, Xianfan, Roth, Stephan, Neuenschwander, Beat, Xu, Jian, Midorikawa, Katsumi, Sugioka, Koji

Year:

2014

Language:

english

File:

PDF, 1.04 MB

english, 2014

31

SPIE Proceedings [SPIE SPIE LASE - San Francisco, California, United States (Saturday 28 January 2017)] Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXII - Laser processing of VO 2 thin films for THz devices and metamaterials applications

Neuenschwander, Beat, Grigoropoulos, Costas P., Makimura, Tetsuya, Račiukaitis, Gediminas, Charipar, Nicholas A., Charipar, Kristin M., Kim, Heungsoo, Mathews, Scott A., Breckenfeld, Eric, Auyeung, Ra

Year:

2017

Language:

english

File:

PDF, 3.56 MB

english, 2017

32

SPIE Proceedings [SPIE SPIE LASE - San Francisco, California, United States (Saturday 28 January 2017)] Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXII - Observation of fs-laser spallative ablation using soft X-ray laser probe

Neuenschwander, Beat, Grigoropoulos, Costas P., Makimura, Tetsuya, Račiukaitis, Gediminas, Nishikino, Masaharu, Hasegawa, Noboru, Tomita, Takuro, Minami, Yasuo, Eyama, Takashi, Kakimoto, Naoya, Izutsu

Year:

2017

Language:

english

File:

PDF, 519 KB

english, 2017

33

Novel strategy for ultrafast pulsed laser micromachining of rotational symmetric metallic parts

Kramer, Thorsten, Remund, Stefan, Gafner, Markus, Zwygart, Daniel, Neuenschwander, Beat, Holtz, Ronald, Witte, Reiner, Dury, Noémie

Journal:

Year:

2018

Language:

english

File:

PDF, 1.22 MB

english, 2018

34

Fulven-Dimere: Synthese, Strukturbeweis and thermisches Verhalten

Beat Uebersax, Markus Neuenschwander, Hans-Peter Kellerhals

Journal:

Helvetica Chimica Acta

Year:

1982

Language:

german

File:

PDF, 845 KB

german, 1982

35

Using historical control information for the design and analysis of clinical trials with overdispersed count data

Gsteiger, Sandro, Neuenschwander, Beat, Mercier, Francois, Schmidli, Heinz

Journal:

Statistics in Medicine

Year:

2013

Language:

english

File:

PDF, 383 KB

english, 2013

36

SPIE Proceedings [SPIE SPIE LASE - San Francisco, California, United States (Saturday 28 January 2017)] Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXII - Throughput scaling by spatial beam shaping and dynamic focusing

Neuenschwander, Beat, Grigoropoulos, Costas P., Makimura, Tetsuya, Račiukaitis, Gediminas, Kumkar, M., Kaiser, M., Kleiner, J., Flamm, D., Grossmann, D., Bergner, K., Zimmermann, F., Nolte, S.

Year:

2017

Language:

english

File:

PDF, 1.16 MB

english, 2017

37

Strukturaufklärung eines Dimethylfulven-Trimeren. Hinweis auf eine [6 + 4]-Cycloaddition von 6, 6-Dimethylfulven

Beat Uebersax, Markus Neuenschwander, Peter Engel

Journal:

Helvetica Chimica Acta

Year:

1982

Language:

german

File:

PDF, 885 KB

german, 1982

38

SPIE Proceedings [SPIE SPIE LASE - San Francisco, California, United States (Saturday 1 February 2014)] Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XIX - Picosecond-laser bulk modification, luminescence, and Raman lasing in single-crystal diamond

Nakata, Yoshiki, Xu, Xianfan, Roth, Stephan, Neuenschwander, Beat, Neuenschwander, B., Jaeggi, B., Romano, V., Pimenov, S. M.

Year:

2014

File:

PDF, 1.03 MB

2014

39

SPIE Proceedings [SPIE SPIE LASE - San Francisco, California, United States (Saturday 13 February 2016)] Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXI - Ultrashort-pulse laser processing of transparent materials: insight from numerical and semi-analytical models

Neuenschwander, Beat, Roth, Stephan, Grigoropoulos, Costas P., Makimura, Tetsuya, Bulgakova, Nadezhda M., Zhukov, Vladimir P., Mirza, Inam, Meshcheryakov, Yuri P., Tomáštík, Jan, Michálek, Václav, Had

Year:

2016

Language:

english

File:

PDF, 769 KB

english, 2016

40

SPIE Proceedings [SPIE SPIE LASE - San Francisco, California, United States (Saturday 1 February 2014)] Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XIX - Laser radiation attenuator on the basis of four Dove's prisms

Nakata, Yoshiki, Xu, Xianfan, Roth, Stephan, Neuenschwander, Beat, Owsik, Jan, Liberman, Anatoly A., Kovalev, Alexander A., Mikryukov, Alexey S., Moskalyuk, Sergey A., Ulanovsky, Michail V., Noga, Jan

Year:

2014

Language:

english

File:

PDF, 324 KB

english, 2014

41

SPIE Proceedings [SPIE SPIE LASE - San Francisco, California, United States (Saturday 1 February 2014)] Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XIX - Ablation dynamics and shock wave expansion during laser processing of CFRP with ultrashort laser pulses

Nakata, Yoshiki, Xu, Xianfan, Roth, Stephan, Neuenschwander, Beat, Wiedenmann, Margit, Haist, Christoph, Freitag, Christian, Onuseit, Volkher, Weber, Rudolf, Graf, Thomas

Year:

2014

Language:

english

File:

PDF, 434 KB

english, 2014

42

SPIE Proceedings [SPIE SPIE LASE - San Francisco, California, United States (Saturday 7 February 2015)] Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XX - Effect of different properties of Cu(In 1-x Ga x )Se 2 thin films synthesized by femtosecond and nanosecond pulsed laser deposition

Roth, Stephan, Nakata, Yoshiki, Neuenschwander, Beat, Xu, Xianfan, Tsai, Mu-Gong, Chen, Chia-Chuan, Chen, You-jyun, Chen, In-Gann, Qi, Xiaoding, Huang, Jung-Chun, Lin, Cen-Ying, Cheng, Chung-Wei

Year:

2015

Language:

english

File:

PDF, 3.96 MB

english, 2015

43

SPIE Proceedings [SPIE SPIE LASE - San Francisco, California, United States (Saturday 13 February 2016)] Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXI - Ultrafast laser processing of transparent materials supported by in-situ diagnostics

Neuenschwander, Beat, Roth, Stephan, Grigoropoulos, Costas P., Makimura, Tetsuya, Kumkar, M., Kaiser, M., Kleiner, J., Grossmann, D., Flamm, D., Bergner, K., Nolte, S.

Year:

2016

Language:

english

File:

PDF, 915 KB

english, 2016

44

Ontogeny and Individual Variation: Analysis of Patterned Covariance Matrices with Common Principal Components

Christian Peter Klingenberg, Beat E. Neuenschwander and Bernard D. Flury

Journal:

Systematic Biology

Year:

1996

Language:

english

File:

PDF, 1.84 MB

english, 1996

45

On the use of co-data in clinical trials

Neuenschwander, Beat, Roychoudhury, Satrajit, Schmidli, Heinz

Journal:

Statistics in Biopharmaceutical Research

Year:

2016

Language:

english

File:

PDF, 360 KB

english, 2016

46

SPIE Proceedings [SPIE SPIE LASE - San Francisco, California, United States (Saturday 28 January 2017)] Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXII - Low temperature deposition of inorganic films by excimer laser assisted chemical vapor deposition

Neuenschwander, Beat, Grigoropoulos, Costas P., Makimura, Tetsuya, Račiukaitis, Gediminas, Kuk, Seungkuk, Park, Jongmin, Zhang, Tao, Hwang, David J.

Year:

2017

Language:

english

File:

PDF, 543 KB

english, 2017

47

Using phase II data for the analysis of phase III studies: An application in rare diseases

Wandel, Simon, Neuenschwander, Beat, Röver, Christian, Friede, Tim

Journal:

Clinical Trials

Year:

2017

Language:

english

File:

PDF, 279 KB

english, 2017

48

SPIE Proceedings [SPIE SPIE LASE - San Francisco, California, United States (Saturday 7 February 2015)] Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XX - Formation of nanogratings in a porous glass immersed in water by femtosecond laser irradiation

Roth, Stephan, Nakata, Yoshiki, Neuenschwander, Beat, Xu, Xianfan, Liao, Yang, Ni, Jielei, Qiao, Lingling, Huang, Min, Bellouard, Yves, Sugioka, Koji, Cheng, Ya

Year:

2015

Language:

english

File:

PDF, 2.44 MB

english, 2015

49

SPIE Proceedings [SPIE SPIE LASE - San Francisco, California, United States (Saturday 1 February 2014)] Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XIX - Smart optical writing head design for laser-based manufacturing

Nakata, Yoshiki, Xu, Xianfan, Roth, Stephan, Neuenschwander, Beat, Amin, M. Junaid, Riza, Nabeel A.

Year:

2014

Language:

english

File:

PDF, 608 KB

english, 2014

50

SPIE Proceedings [SPIE SPIE LASE - San Francisco, California, United States (Saturday 13 February 2016)] Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXI - High-efficiency bispectral laser source for EUV lithography

Neuenschwander, Beat, Roth, Stephan, Grigoropoulos, Costas P., Makimura, Tetsuya, Zhevlakov, A. P., Seisyan, R. P., Bespalov, V. G., Elizarov, V. V., Grishkanich, A. S., Kascheev, S. V.

Year:

2016

Language:

english

File:

PDF, 612 KB

english, 2016

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